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Introduction to Microsystems

Field of study: Nanotechnologies

Level: Bachelor

Objectives: The aim of the lectures is to give an overview of the Microsystems world and the MEMS devices. It has been structured so to introduce the main features and properties of Microsystems and their current and potential advantages which mainly derive from miniaturization and the evolution of the standard IC technological approach. Through the description of some significant examples, an evidence will be given of how dramatically Microsystems have changed our life and our habits.

Behind MEMS and Microsystems there is a manufacturing technology; a paradigm for designing and creating complex devices and systems as well as their integrated electronics using batch fabrication techniques. Miniaturization and the adoption of the IC batch approach has allowed for the fabrication of extremely low power devices, their exploitation in wireless sensor networks or wireless applications, the integration of multiple functions on the same platform, the increase of sensitivity, the manufacturing of portable sensing solutions and the minimization of invasivity for biomedical devices.

The complexity of MEMS is also shown in the extensive range of markets and applications incorporating MEMS devices. An outline of MEMS devices and Microsystems main application fields will be given, with a particular focus onto the automotive, consumer electronics, energy conversion, entertainment, medical, textile and defence sectors. Practical examples for each application field will be described considering both commercially successful cases and advanced prototypes under development.

Lecture/contact hours: 7.5 hours

Teaching language: English

Detailed examination modalities: written exam

Instructor: Matteo COCUZZA, from Politecnico di Torino
E-mail : matteo.cocuzza@infm.polito.it
Phone : +39 011 564 3400

Date of update December 7, 2018

Univ. Grenoble Alpes